Product Overview
Our 95% alumina ceramic threaded rods and nuts are engineered specifically for semiconductor manufacturing equipment, offering superior chemical resistance, electrical insulation, and thermal stability in critical processing environments. These custom-made refractory ceramic components outperform metal alternatives in plasma etching, CVD, and wafer handling systems where contamination must be eliminated.
Key Features & Benefits
✔ Ultra-High Purity - 95% Al₂O₃ composition minimizes particle generation
✔ Plasma-Resistant - Withstands aggressive semiconductor process gases
✔ Non-Contaminating - Meets SEMI F47 standards for cleanroom use
✔ Thermal Shock Resistant - Stable from -200°C to 1500°C
✔ Custom Threading - Metric, UN, or special thread profiles available
✔ Precision Machined - Tight tolerances (±0.1mm) for exact fit
Critical Industrial Applications
1. Plasma Etching Systems
Process chamber fasteners resistant to CF₄/O₂ plasmas
Electrode mounting rods with high dielectric strength
Nozzle retention nuts for gas distribution assemblies
2. CVD/Load Lock Components
Wafer boat support rods maintaining dimensional stability
Heater block fasteners for high-temp furnaces
Vacuum flange hardware preventing outgassing
3. Wafer Handling & Inspection
Robot end effector shafts with non-marking surfaces
Metrology stage components for vibration isolation
Reticle clamp nuts eliminating metal contamination
4. Ion Implantation
Beamline insulators with high voltage resistance
Target fixture components for precise positioning
Faraday cage fasteners preventing charge buildup
5. Wet Process Equipment
Chemical bath racks resisting HF/HNO₃ mixtures
DI water system fittings preventing ionic contamination
Ultrapure gas line connectors with hermetic seals
Competitive Advantages
✅ Factory Direct Pricing - Eliminate middleman markups
✅ ISO-Certified Manufacturing - Consistent quality assurance
✅ Rapid Prototyping - 2-3 week lead time for samples
✅ Technical Expertise - 30+ years in advanced ceramics
✅ Global Logistics - Reliable worldwide shipping
Properties | Units | Steatite Ceramic | Cordierite Ceramic | Mullite Ceramic | 95% Al2O3 | 99% Al2O3 | Zirconia Ceramic | Silicon Nitride |
Colour | White | Yellow | White | White | Ivory | White | Grey | |
Density | g/cm3 | 2.7 | 1.9 | 2.6 | 3.5 | 3.85 | 6 | 3.2 |
Flexural Strength | Mpa | 140 | 30 | 120 | 280 | 340 | 1150 | 600 |
Compressive Strength | MPa | 900 | 350 | 500 | 2100 | 2200 | 2500 | 2500 |
Max Use Temperature | °C | 1000 | 1200 | 1300 | 1400 | 1650 | 1500 | 1800 |
Thermal Condutivity | W(m.K) | 2~3 | 1.3~1.8 | 2~6 | 16~28 | 19~30 | 2.5 | 20 |
Thermal Expansion Cofficient | 10-6/°C | 7 ~ 9 | 1.5~3.5 | 5~6 | 6.5~7.5 | 6~8 | 8~10 | 3~4 |
ThermalShock Resistance | △TC | 100 | 300 | 150 | 140 | 150 | 250 | 600 |
Specific Heat | J/kg.K | 850 | 800 | 900 | 950 | 950 | 500 | 500 |
Dielectric Strength | KV/mm | 20 | — | 30 | 12 | 10 | 5 | 20 |
Dielectric Constant | Er | 6 | — | 8 | 9 | 9 | 12 | 6 |
Product Advantages
● Certificates: ISO & SGS
● OEM & ODM: OEM & ODM service is available
● Strict testing procedures :Meeting the requirements of the product design and process, providing reliable testing data.
● Short Delivery time:If less than 1000 pieces, it only takes around 5 days. We also stock some standard-sized products, if you need urgently, we can delivery very soon.
● Best ex-factory price
● Worldwide customers
● Customized according to needs
● Continuous research and development of new products
● Customer service:If you find some quality problem, please contact us, we’ll deal with it as soon as possible.
Our customers have a wide range of processing choices for transportation mode.
Yixing Shengda Refractory Ceramic Co., Ltd, established in 1995, Yixing, China with an area of 4,000 square meters and fixed assets of over 1 million US dollars, is a professional manufacturer of Steatite Ceramic Parts, Alumina Ceramic Parts, Cordierite Ceramic Parts, Ceramic Band Heater Insulators, Ceramic Terminal Block, Thermostat Ceramic Parts, Zirconia Ceramics Parts, Ceramic Heater Plugs, etc.
Shengda Ceramic equipped with CAD/CAXA/Solidworks software to provide professional OEM & ODM service.
Looking forward to co-operating with the customers from all over the world!
