Product Overview
Our 95% alumina ceramic substrate chucks and shims are engineered for demandingindustrial applications requiring exceptional flatness, thermal stability, and wear resistance. These precision ceramic components combine high mechanical strength withoutstanding electrical insulation properties, making them ideal for semiconductor, laser processing, and precision measurement equipment.
Key Features & Benefits
✔ Ultra-Precise Flatness - ≤5μm flatness for critical alignment applications
✔ High-Temperature Stability - Maintains dimensional integrity up to 1500°C
✔ Superior Wear Resistance - Mohs hardness of 9 for long service life
✔ Excellent Electrical Insulation - Volume resistivity >10¹⁴ Ω·cm
✔ Custom Machining Services - Precision cutting, drilling, and grinding available
✔ Chemical Inertness - Resists acids, alkalis, and corrosive gases
Critical Industrial Applications
1. Semiconductor Manufacturing
Wafer handling chucks for lithography equipment
ESD-safe substrate carriers in cleanrooms
Vacuum chamber components with high dimensional stability
2. Laser Processing Equipment
Laser cutting platform shims with high reflectivity
Precision alignment components for optical systems
Thermally stable mounting plates for CO₂ lasers
3. Precision Measurement Instruments
Coordinate measuring machine (CMM) components
Metrology reference standards with ultra-flat surfaces
Vibration-isolation platforms for sensitive equipment
4. Industrial Automation
Robotic end-effector components
Linear motion system shims
Wear-resistant guide plates for high-speed automation
5. Energy & Power Electronics
Power module insulation substrates
Heat spreader plates for IGBT modules
High-voltage insulating components
Competitive Advantages
✅ In-House Manufacturing - Full control over quality and lead times
✅ Material Expertise - 15+ years in advanced ceramic engineering
✅ Application Support - Technical consultation for optimal performance
✅ Competitive Pricing - Direct factory pricing with no middlemen
Properties | Units | Steatite Ceramic | Cordierite Ceramic | Mullite Ceramic | 95% Al2O3 | 99% Al2O3 | Zirconia Ceramic | Silicon Nitride |
Colour | White | Yellow | White | White | Ivory | White | Grey | |
Density | g/cm3 | 2.7 | 1.9 | 2.6 | 3.5 | 3.85 | 6 | 3.2 |
Flexural Strength | Mpa | 140 | 30 | 120 | 280 | 340 | 1150 | 600 |
Compressive Strength | MPa | 900 | 350 | 500 | 2100 | 2200 | 2500 | 2500 |
Max Use Temperature | °C | 1000 | 1200 | 1300 | 1400 | 1650 | 1500 | 1800 |
Thermal Condutivity | W(m.K) | 2~3 | 1.3~1.8 | 2~6 | 16~28 | 19~30 | 2.5 | 20 |
Thermal Expansion Cofficient | 10-6/°C | 7 ~ 9 | 1.5~3.5 | 5~6 | 6.5~7.5 | 6~8 | 8~10 | 3~4 |
ThermalShock Resistance | △TC | 100 | 300 | 150 | 140 | 150 | 250 | 600 |
Specific Heat | J/kg.K | 850 | 800 | 900 | 950 | 950 | 500 | 500 |
Dielectric Strength | KV/mm | 20 | — | 30 | 12 | 10 | 5 | 20 |
Dielectric Constant | Er | 6 | — | 8 | 9 | 9 | 12 | 6 |
Product Advantages
● Certificates: ISO & SGS
● OEM & ODM: OEM & ODM service is available
● Strict testing procedures :Meeting the requirements of the product design and process, providing reliable testing data.
● Short Delivery time:If less than 1000 pieces, it only takes around 5 days. We also stock some standard-sized products, if you need urgently, we can delivery very soon.
● Best ex-factory price
● Worldwide customers
● Customized according to needs
● Continuous research and development of new products
● Customer service:If you find some quality problem, please contact us, we’ll deal with it as soon as possible.
Our customers have a wide range of processing choices for transportation mode.
Yixing Shengda Refractory Ceramic Co., Ltd, established in 1995, Yixing, China with an area of 4,000 square meters and fixed assets of over 1 million US dollars, is a professional manufacturer of Steatite Ceramic Parts, Alumina Ceramic Parts, Cordierite Ceramic Parts, Ceramic Band Heater Insulators, Ceramic Terminal Block, Thermostat Ceramic Parts, Zirconia Ceramics Parts, Ceramic Heater Plugs, etc.
Shengda Ceramic equipped with CAD/CAXA/Solidworks software to provide professional OEM & ODM service.
Looking forward to co-operating with the customers from all over the world!
